12th International Workshop on Plasma Based Ion Implantation and Deposition

›8:40 (1h35)

Plasma-Based Ion Assisted Deposition and Pulsed Power Deposition
R. Wei, X.Y. Liu

› IFMI Amphitheatre

8:40 - 10:15 (1h35)

Plasma-Based Ion Assisted Deposition and Pulsed Power Deposition

IFMI Amphitheatre

R. Wei, X.Y. Liu

› Amorphous hydrogenated carbon thin films deposited by segmented hollow cathode (Invited talk) - Carlos Figueroa, Plasmar Tecnologia, Universidade de Caxias do Sul 08:40-09:15 (35min)

› Strain-relaxed SiGe layer on Si formed by PIII&D technology - Seunghee Han, Photo-electronic Hybrids Research Center, Korea Institute of Science and Technology 09:15-09:35 (20min)

› Structure and tribological properties of magnetron sputtered quaternary (Ti,Zr)1-xAlxN and (Ti,Zr)1-xSixN films - Igor Saladukhin, Belarussian State University 09:35-09:55 (20min)

› The target sputtering mechanism in HIPIMS - Xinxin Ma, State Key Lab of Advanced Welding and Joining, Harbin Institute of Technology 09:55-10:15 (20min)

›10:15 (30min)

Coffee break

› IFMI Hall

10:15 - 10:45 (30min)

Coffee break

IFMI Hall

›10:45 (1h35)

Plasma-Based Ion Assisted Deposition and Pulsed Power Deposition
J. Pelletier, G. Abadias

› IFMI Amphitheatre

10:45 - 12:20 (1h35)

Plasma-Based Ion Assisted Deposition and Pulsed Power Deposition

IFMI Amphitheatre

J. Pelletier, G. Abadias

› Hybrid HIPIMS power supply and plasma ion implantation and deposition (Invited talk) - Xiubo Tian, State Key lab of advanced welding & Joining 10:45-11:20 (35min)

› CONTROL OF THE DUAL ION BEAM DEPOSITION PROCESS TO PERFORM LOW-LOSS MIRRORS. - Vincent DOLIQUE, Laboratoire des matériaux avancés 11:20-11:40 (20min)

› Alumina Precipitation in a-C:H Films by Plasma Immersion Ion Implantation and Deposition - Elidiane Rangel, Univ Est Paulista 11:40-12:00 (20min)

› Influence of nitrogen content on CrSiN thin film properties deposited by reactive HiPIMS - Axel FERREC, Institut des Matériaux Jean Rouxel - Frédéric SCHUSTER, Laboratoire Commun MATPERF CEA-Mécachrome 12:00-12:20 (20min)

›12:20 (20min)

Closing session
L. Pichon, J. Pelletier

› IFMI Amphitheatre

12:20 - 12:40 (20min)

Closing session

IFMI Amphitheatre

L. Pichon, J. Pelletier

›12:40 (1h35)

Lunch

12:40 - 14:15 (1h35)

Lunch