Accepted abstracts by author > Granier Agnès

Tuesday 2
Posters session A

› 17:00 - 19:00 (2h)
› IFMI - Rooms A & B
Synthesis of carbon/metal nanocomposites by PVD/PECVD
Abdel Aziz El Mel  2, 1@  , Nicolas Bouts  2@  , Benoit Angleraud  2@  , Agnès Granier  2@  , Eric Gautron  2@  , Pierre-Yves Tessier  2@  
2 : Institut des Matériaux Jean Rouxel  (IMN)
Université de Nantes, CNRS
1 : Chimie des Interactions Plasma Surface, CIRMAP, Université de Mons  (ChIPS)

A hybrid plasma process has been employed to prepare metal/carbon nanocomposite thin films. This process combines magnetron sputtering of metal target and plasma enhanced chemical vapor deposition using methane as a precursor for carbon deposition. Two metals have been selected for this study: titanium and nickel.

These films can be synthesized in a wide range of chemical composition from pure metal to pure carbon by varying the methane ratio in the argon/methane plasma.

The microstructure analysis revealed that the Ti containing carbon films were formed of TiC nanoparticles embedded in a hydrogenated amorphous carbon matrix. By adjusting the carbon content within the films, the size of the nanoparticles can be controlled in the 3-30 nm range.

For Ni/C thin films, an original microstructure corresponding to Ni nanowires embedded in an amorphous carbon phase has been identified.



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