Accepted abstracts by Session
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Structure and tribological properties of magnetron sputtered quaternary (Ti,Zr)1-xAlxN and (Ti,Zr)1-xSixN films Igor Saladukhin, Grégory ABADIAS, Vladimir Uglov, Sergey Zlotski, Philippe Guérin sciencesconf.org:pbiid2013:12885
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Development of in-plane texture in Cu thin films by post deposition ion beam treatment Huan Ma, Matteo Seita, Ralph Spolenak sciencesconf.org:pbiid2013:12896
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Alumina Precipitation in a-C:H Films by Plasma Immersion Ion Implantation and Deposition Elidiane Rangel, Thais Gonçalves, Luiz Silva, Rita Rangel, Nilson Cruz sciencesconf.org:pbiid2013:12907
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Hydrogen Induced Buckling of Gold Films eren Baran, Marot Laurent, Günzberger Gino, Renault Pierre-olivier, Glatzel Thilo, Steiner Roland, Meyer Ernst sciencesconf.org:pbiid2013:12924
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IN SITU XRD STUDIES, USING SYNCHROTRON RADIATION, OF THIN FILM GROWING BY REACTIVE SPUTTER MAGNETRON TECHNIQUE. Jorge Feugeas, Juan Bürgi, Javier Garcia Molleja, Guinter Kellermann, Abdou Djouadi, Pierre-Yves Jouan, Aldo Craievich sciencesconf.org:pbiid2013:12961
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Strain-relaxed SiGe layer on Si formed by PIII&D technology Seunghee Han, Sun-Woo Moon, Sung-Min Kim, Kyung-Hun Kim, Jin-Hyeok Jang sciencesconf.org:pbiid2013:12980
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CONTROL OF THE DUAL ION BEAM DEPOSITION PROCESS TO PERFORM LOW-LOSS MIRRORS. Vincent DOLIQUE, Raffaele Flaminio, Danielle Forest, Massimo Granata, Bernard Lagrange, Christophe Michel, Nazario Morgado, Laurent Pinard, Gianpietro Cagnoli, Alix CAJGFINGER sciencesconf.org:pbiid2013:12986
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Amorphous hydrogenated carbon thin films deposited by segmented hollow cathode (Invited talk) Solveig Dufrène, Felipe Cemin, César Aguzzoli, Marcelo Maia da Costa, Israel Baumvol, Carlos Figueroa sciencesconf.org:pbiid2013:13463
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Reactive High-Power Impulse Magnetron Sputtering: plasma diagnostics and thin film synthesis (Invited talk) Stephanos Konstantinidis sciencesconf.org:pbiid2013:13858
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Hybrid HIPIMS power supply and plasma ion implantation and deposition (Invited talk) Xiubo Tian, Chunzhi Gong, Paul Chu sciencesconf.org:pbiid2013:14006
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Nanorippled dielectric thin films as templates for self-organized silver nanoparticles using a dual ion-beam sputtering system elliot Vandenhecke, David BABONNEAU, Sophie Camelio, sophie Rousselet, Philippe Guérin sciencesconf.org:pbiid2013:14013
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Calculation of film thickness distribution onto disk substrates in multi-cathode magnetron sputtering system with plate targets Anatoly Kuzmichev, Oleg Volpian sciencesconf.org:pbiid2013:14025
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Influence of nitrogen content on CrSiN thin film properties deposited by reactive HiPIMS Axel FERREC, Frédéric SCHUSTER, Pierre-Yves Jouan, Mohamed Abdou DJOUADI sciencesconf.org:pbiid2013:14072
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The target sputtering mechanism in HIPIMS Shuying Zhen, Xinxin Ma, Guangze Tang, Whenzhu Shao, Ken Yukimura sciencesconf.org:pbiid2013:15031
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